Superhard nanocomposite coatings. From basic science toward industrialization*
S. Veprek1, and M. Jilek2,§
1Institute for Chemistry of Inorganic Materials, Technical
University Munich, Lichtenbergstrasse 4, D-85747 Garching, Germany;
2SHM, Ltd., Novy Malin 266, CZ-788 03 Novy Malin, Czech Republic
Abstract: A variety of superhard coatings with Vickers plastic
hardness exceeding 40 GPa have been reported by several research groups
during the last five years (for recent reviews see refs [1,2]). However,
one has to distinguish between superhard nanocomposites, such as nc-TiN/a-Si3N4,
nc-TiN/a-Si3N4/a- and nc-TiSi2, nc-(Ti1-xAlx)N/a-Si3N4, nc-TiN/TiB2,
nc-TiN/BN, etc. where the high hardness originates from the nanostrucutre
and, therefore, remains stable upon annealing to high temperatures [1],
and coatings, such as CrN/Ni, ZrN/Ni, and others [2] in which the measured
high hardness is due to a high compressive stress that is induced in
the coatings due to energetic ion bombardment during their deposition
(e.g., by magnetron sputtering). We also summarize the recent progress
in the industrial applications of the superhard nanocomposite coatings
on machining tools.
* Lecture presented at the 15th International Symposium
on Plasma Chemistry, Orléans, France, 9-13 July 2001. Other presentations
are presented in this issue, pp. 317–492.
** Corresponding author.
Page last modified 19 April 2002.
Copyright © 2002 International Union of Pure and Applied Chemistry.
Questions or comments about IUPAC, please contact, the Secretariat.
Questions regarding the website, please contact web
manager.
